Semiconductor Machinery Manufacturing
NAICS 333242 · Federal Contracts & Awards
Companies in the Semiconductor Machinery Manufacturing industry (NAICS code 333242) have received $94.3M in federal contracts, grants, and other awards since FY2024, across 113 individual awards tracked through FY2026. The largest funding agency is Department of Defense ($55.8M). Spending is concentrated in Minnesota, California, Maryland and 18 other states. All figures below come from USAspending.gov award records.
Total Obligations
$94.3M
Total Awards
113
States
21
Last Updated
Apr 17, 2026
Yearly Spending Trend
$63.4M24
$30.7M25
$136K26
Top 50 Awards in Semiconductor Machinery Manufacturing
Largest individual obligations in NAICS 333242.
| Award | Recipient | Awarding Agency | Program | Place | FY | Obligation |
|---|---|---|---|---|---|---|
CONT_AWD_N0016424FG027_9700_N0016423GGM75_9700 SRHM ENGINEERING SERVICE TASKS PERTINENT TO MAINTENANCE AND SUSTAINMENT OF HONEYWELL SRHM FABRICATION FACILITY | HONEYWELL INTERNATIONAL, INC. Minnesota | Department of Defense Department of the Navy | — | MINNEAPOLIS, MN-03 | 2024 | $25,799,927 |
CONT_AWD_1333ND23CNB680037_1341_-NONE-_-NONE- PURCHASE OF RAITH EBL | RAITH AMERICA INC New York | Department of Commerce National Institute of Standards and Technology | — | — | 2025 | $8,585,000 |
CONT_AWD_N0016425FG003_9700_N0016423GGM75_9700 DARK FIELD DEFECT INSPECTION TOOL, THERMOSTREAM, MEMORY REPAIR LASER, WIREBONDER | HONEYWELL INTERNATIONAL, INC. Minnesota | Department of Defense Department of the Navy | — | MINNEAPOLIS, MN-03 | 2025 | $6,598,726 |
CONT_AWD_HQ072724C1003_9700_-NONE-_-NONE- WAFER I-STEPPER TO DESIGN, FABRICATE, ASSEMBLE, BUILD, TEST, EVALUATE, VERIFY, VALIDATE, AND PROCURE MICROELECTRONICS AND/OR OPERATE SUCH A FACILITY. | CANON U.S.A., INC. California | Department of Defense Defense Microelectronics Activity | — | SAN JOSE, CA-17 | 2024 | $5,246,000 |
CONT_AWD_1333ND23PNB680247_1341_-NONE-_-NONE- STORAGE FOR EQUIPMENT PRIOR TO INSTALLATION | HEIDELBERG INSTRUMENTS INC. California | Department of Commerce National Institute of Standards and Technology | — | — | 2025 | $4,714,125 |
CONT_AWD_1333ND23PNB680339_1341_-NONE-_-NONE- PURCHASE OF A JBX-8100FS ELECTRON BEAM LITHOGRAPHY SYSTEM | JEOL USA, INC. Massachusetts | Department of Commerce National Institute of Standards and Technology | — | — | 2024 | $3,409,716 |
CONT_AWD_1333ND23PNB680286_1341_-NONE-_-NONE- PURCHASE OF A TYSTAR FURNACE | TYSTAR CORPORATION California | Department of Commerce National Institute of Standards and Technology | — | GARDEN GROVE, CA-45 | 2024 | $2,741,275 |
CONT_AWD_W911QX23C0006_9700_-NONE-_-NONE- DIAMOND GROWTH REACTOR TECHNOLOGY. THIS MODIFICATION EXTENDS THE DELIVERY DATE, UPDATES THE MILESTONE PLAN, AND UPDATES THE GOVERNMENT POINTS OF CONTACT. | ELEMENT SIX TECHNOLOGIES U.S. CORPORATION California | Department of Defense Department of the Army | — | PORTLAND, OR-03 | 2025 | $2,694,812 |
CONT_AWD_HQ072723C0008_9700_-NONE-_-NONE- KLA/SPTS SIC TRENCH ETCH TOOL | KLA CORPORATION California | Department of Defense Defense Microelectronics Activity | — | MCCLELLAN, CA-06 | 2024 | $2,285,744 |
CONT_AWD_1333ND22PNB680496_1341_-NONE-_-NONE- ION BEAM SPUTTERING SYSTEM | VEECO PROCESS EQUIPMENT INC. Minnesota | Department of Commerce National Institute of Standards and Technology | — | SOMERSET, NJ-12 | 2024 | $2,003,690 |
CONT_AWD_80GSFC22PA009_8000_-NONE-_-NONE- ELECTRON BEAM LITHOGRAPHER (EBL), USED TO DEFINE NANO-SIZED GEOMETRIC STRUCTURES NEEDED IN THE FABRICATION OF ADVANCED SENSORS, DETECTORS, OPTICAL AND MICROMACHINED COMPONENTS. | RAITH AMERICA INC New York | National Aeronautics and Space Administration National Aeronautics and Space Administration | — | GREENBELT, MD-04 | 2024 | $1,947,910 |
CONT_AWD_1333ND23PNB680281_1341_-NONE-_-NONE- MOD TO CHANGE TPOC | KLA CORPORATION California | Department of Commerce National Institute of Standards and Technology | — | GAITHERSBURG, MD-06 | 2025 | $1,713,660 |
CONT_AWD_1333ND24PNB030275_1341_-NONE-_-NONE- PURCHASE OF XEUSS X-RAY DIFFRACTION SYSTEM | XENOCS INC. Massachusetts | Department of Commerce National Institute of Standards and Technology | — | — | 2024 | $1,653,006 |
CONT_AWD_HQ072723C0007_9700_-NONE-_-NONE- CUSTOMS/IMPORT FEES | 3D-MICROMAC AMERICA LLC California | Department of Defense Defense Microelectronics Activity | — | SAN JOSE, CA-17 | 2024 | $1,521,220 |
CONT_AWD_1333ND23PNB680583_1341_-NONE-_-NONE- PURCHASE OF THE COAT SYSTEM | SCIA SYSTEMS GMBH | Department of Commerce National Institute of Standards and Technology | — | — | 2024 | $1,503,346 |
CONT_AWD_N0016423FG075_9700_N0016423GGM75_9700 SHRM ENGINEERING SERVICES REPORTING SUPPORT | HONEYWELL INTERNATIONAL, INC. Minnesota | Department of Defense Department of the Navy | — | MINNEAPOLIS, MN-03 | 2024 | $1,415,071 |
CONT_AWD_1333ND23PNB680350_1341_-NONE-_-NONE- PURCHASE OF A PLASMATHERM ETCHER | PLASMA-THERM LLC Florida | Department of Commerce National Institute of Standards and Technology | — | SAINT PETERSBURG, FL-14 | 2024 | $1,076,690 |
CONT_AWD_SPMYM223P1596_9700_-NONE-_-NONE- RECTIFIER | SCR, INC. California | Department of Defense Defense Logistics Agency | — | ALISO VIEJO, CA-40 | 2024 | $1,070,302 |
CONT_AWD_N0017324P2410_9700_-NONE-_-NONE- NRL DUAL CHAMBER THIN FILM SPUTTER DEPOSITION SYSTEM | AJA INTERNATIONAL, INC. Massachusetts | Department of Defense Department of the Navy | — | WASHINGTON, DC-98 | 2024 | $968,000 |
CONT_AWD_80GSFC20P0016_8000_-NONE-_-NONE- HIGH UNIFORMITY SPUTTER DEPOSITION SYSTEM | KDF TECHNOLOGIES LLC New Jersey | National Aeronautics and Space Administration National Aeronautics and Space Administration | — | ROCKLEIGH, NJ-05 | 2024 | $908,460 |
CONT_AWD_W911QX22P0146_9700_-NONE-_-NONE- NO COST EXTENSION MODIFICATION FOR MOLECULAR BEAM SYSTEM | SCIENTA OMICRON, INC. Colorado | Department of Defense Department of the Army | — | DENVER, CO-01 | 2024 | $818,125 |
CONT_AWD_80GSFC24PA004_8000_-NONE-_-NONE- REMOVAL OF CLAUSES IAW EOS 14173 AND 14168 MASK ALIGNER SYSTEM WITH ALIGN-FOR-BOND CAPABILITIES, FOR USE IN THE DETECTOR DEVELOPMENT LAB (DDL). | EV GROUP INC Arizona | National Aeronautics and Space Administration National Aeronautics and Space Administration | — | TEMPE, AZ-04 | 2024 | $748,800 |
CONT_AWD_1333ND24PNB680255_1341_-NONE-_-NONE- PURCHASE OF A TRI-LAYER SYSTEM | KURT J LESKER CO Pennsylvania | Department of Commerce National Institute of Standards and Technology | — | CLAIRTON, PA-12 | 2024 | $738,030 |
CONT_AWD_W911QX22P0150_9700_-NONE-_-NONE- ONE (1) ADVANCED ATOMIC-LAYER DEPOSITION (ALD) SYSTEM WITH REMOTE INDUCTIVELY-COUPLED PLASMA (ICP) SOURCE AND ADDITIONAL COMPONENTS | KURT J LESKER CO Pennsylvania | Department of Defense Department of the Army | — | HYATTSVILLE, MD-04 | 2025 | $699,960 |
CONT_AWD_N0017325P0063_9700_-NONE-_-NONE- TO PROCURE THE INDUCTIVELY COUPLED PLASMA (ICP) DEEP REACTIVE ION ETCHING (DRIE) TOOL TO INCLUDE ALL OF THE REQUIRED SPECIFICATIONS FOUND IN ATTACHMENT 1. | OXFORD INSTRUMENTS AMERICA, INC. Massachusetts | Department of Defense Department of the Navy | — | CONCORD, MA-03 | 2025 | $687,896 |
CONT_AWD_1333ND25PNB670030_1341_-NONE-_-NONE- PLANAR JUNCTION DEPOSITION SYSTEM (SPUTTER) | ANGSTROM ENGINEERING INC | Department of Commerce National Institute of Standards and Technology | — | — | 2025 | $684,800 |
CONT_AWD_1333ND20PNB680491_1341_-NONE-_-NONE- THE PURPOSE OF THIS MODIFICATION IS TO DEOBLIGATE UNLIQUIDATED FUNDS FROM CLIN 0008 AS PART OF THE AWARD CLOSEOUT PROCESS. | PLASMA-THERM LLC Florida | Department of Commerce National Institute of Standards and Technology | — | SAINT PETERSBURG, FL-14 | 2025 | $631,303 |
CONT_AWD_N0017325P2469_9700_-NONE-_-NONE- NANOCRYSTALLINE DIAMOND REACTOR SYSTEM WITH SHIPPING, INSTALLATION, TRAINING, TESTING AND WARRANTY | PLASMABILITY LLC Texas | Department of Defense Department of the Navy | — | WASHINGTON, DC-98 | 2025 | $630,000 |
CONT_AWD_1333ND24PNB640662_1341_-NONE-_-NONE- REVISE DELIVERY DATE | ALEPH SCIENTIFIC LLC California | Department of Commerce National Institute of Standards and Technology | — | — | 2024 | $586,840 |
CONT_AWD_HQ072724PE004_9700_-NONE-_-NONE- PWS 24-4G6 - C1 HIGH TEMP UPGRADE | THERMCO SYSTEMS LIMITED | Department of Defense Defense Microelectronics Activity | — | — | 2024 | $569,160 |
CONT_AWD_N0017325P2417_9700_-NONE-_-NONE- WAFER GRINDER AND CHEMICAL MECHANICAL POLISHER (CMP) TOOL | AXUS TECHNOLOGY LLC Arizona | Department of Defense Department of the Navy | — | CHANDLER, AZ-04 | 2025 | $569,080 |
CONT_AWD_80TECH24PA003_8000_-NONE-_-NONE- THIS REQUIREMENT IS FOR THE PURCHASE OF A KURT J. LESKER CO. PVD500 RF/DC SPUTTER DEPOSITION TOOL. THE TOOL WILL PROVIDE ENHANCED CAPABILITY TO THAT CURRENTLY IN PLACE. | KURT J LESKER CO Pennsylvania | National Aeronautics and Space Administration National Aeronautics and Space Administration | — | CLAIRTON, PA-12 | 2024 | $538,100 |
CONT_AWD_N0017320P2031_9700_-NONE-_-NONE- SUPPLY CONTRACTS AND PRICED ORDERS | OXFORD INSTRUMENTS AMERICA, INC. Massachusetts | Department of Defense Defense Contract Management Agency | — | WOBURN, MA-05 | 2024 | $527,617 |
CONT_AWD_W911QX23P0008_9700_-NONE-_-NONE- PHYSICAL VAPOR DISPOSITION SYSTEM | SCIENTA OMICRON, INC. Colorado | Department of Defense Department of the Army | — | DENVER, CO-01 | 2025 | $516,165 |
CONT_AWD_FA875123C0008_9700_-NONE-_-NONE- WAFER DICING SAW AND WATER CONDITIONING/RECYCLING SYSTEM | DISCO HI-TEC AMERICA, INC California | Department of Defense Department of the Air Force | — | SAN JOSE, CA-19 | 2024 | $502,400 |
CONT_AWD_N0017325P0057_9700_-NONE-_-NONE- THIS IS FOR THE PROCUREMENT OF A PHOTORESIST DIRECT WRITE LITHOGRAPHY SYSTEM. | RAITH AMERICA INC New York | Department of Defense Department of the Navy | — | TROY, NY-20 | 2025 | $485,800 |
CONT_AWD_80GSFC20P0018_8000_-NONE-_-NONE- CHEMICAL MECHANICAL PLANARIZATION SYSTEM | AXUS TECHNOLOGY LLC Arizona | National Aeronautics and Space Administration National Aeronautics and Space Administration | — | CHANDLER, AZ-04 | 2024 | $456,760 |
CONT_AWD_W911QX22C0036_9700_-NONE-_-NONE- ONE (1) ULTRA-HIGH VACUUM (UHV) THIN METAL FILM DEPOSITION SYSTEM. | UNITED MINERAL & CHEMICAL CORP New Jersey | Department of Defense Department of the Army | — | ADELPHI, MD-04 | 2024 | $395,000 |
CONT_AWD_1333ND24PNB030285_1341_-NONE-_-NONE- PURCHASE OF A VISTA ONE AFM PLATFORM | MOLECULAR VISTA, INC. California | Department of Commerce National Institute of Standards and Technology | — | SAN JOSE, CA-19 | 2024 | $379,750 |
CONT_AWD_1333ND25PNB680411_1341_-NONE-_-NONE- REFURBISHMENT AND UPGRADE OF SIX SPIN RINSER DRYER UNITS AS WELL AS PURCHASE OF TWO NEW UNITS.OU68-25-NEW-180 | SITEK PROCESS SOLUTIONS California | Department of Commerce National Institute of Standards and Technology | — | ROCKLIN, CA-03 | 2025 | $298,845 |
CONT_AWD_N6600124P6067_9700_-NONE-_-NONE- BALL BONDER WITH PERIPHERALS | F & K DELVOTEC INC. California | Department of Defense Department of the Navy | — | — | 2024 | $276,754 |
CONT_AWD_1333ND24PNB030208_1341_-NONE-_-NONE- PURCHASE OF A MAGNETOMETER | LAKE SHORE CRYOTRONICS, INC. Ohio | Department of Commerce National Institute of Standards and Technology | — | WESTERVILLE, OH-04 | 2024 | $263,641 |
CONT_AWD_HQ072724P0010_9700_-NONE-_-NONE- GAS ABATEMENT UNIT TO DESIGN, FABRICATE, ASSEMBLE, BUILD, TEST, EVALUATE, VERIFY, VALIDATE, AND PROCURE MICROELECTRONICS AND/OR OPERATE SUCH A FACILITY. | EDWARDS VACUUM LLC New York | Department of Defense Defense Microelectronics Activity | — | SANBORN, NY-26 | 2024 | $252,626 |
CONT_AWD_1333ND22PNB680295_1341_-NONE-_-NONE- EXERCISING OY3 AND CHANGE OF COR | CRITICAL CLEANING SERVICES, LLC Maryland | Department of Commerce National Institute of Standards and Technology | — | GAITHERSBURG, MD-06 | 2024 | $251,583 |
CONT_AWD_W9132T24P0019_9700_-NONE-_-NONE- LASER PATTERNING EQUIPMENT- U435CEI | TEVET LLC Tennessee | Department of Defense Department of the Army | — | CHAMPAIGN, IL-13 | 2024 | $246,926 |
CONT_AWD_1333ND25PNB030091_1341_-NONE-_-NONE- OU03-25-NEW-154 QTY 3 RX ANTENNA (W-1218-RX) | EXTREME WAVES, INC. California | Department of Commerce National Institute of Standards and Technology | — | SAN DIEGO, CA-51 | 2025 | $245,000 |
CONT_AWD_1333ND24PNB030629_1341_-NONE-_-NONE- CHIPS COUPONS & WAFERS | MOSAIC MICROSYSTEMS LLC New York | Department of Commerce National Institute of Standards and Technology | — | ROCHESTER, NY-25 | 2024 | $238,876 |
CONT_AWD_80NSSC24PC305_8000_-NONE-_-NONE- SEMI-AUTOMATED COATING/DEVELOPING PLATFORM FOR SEMICONDUCTOR FABRICATION | SUSS MICROTEC INC California | National Aeronautics and Space Administration National Aeronautics and Space Administration | — | CORONA, CA-40 | 2024 | $208,230 |
CONT_AWD_80NSSC24PA986_8000_-NONE-_-NONE- ANNUAL SERVICE AGREEMENT | CANON U.S.A., INC. California | National Aeronautics and Space Administration National Aeronautics and Space Administration | — | SAN JOSE, CA-17 | 2024 | $159,600 |
CONT_AWD_80NSSC24PA240_8000_-NONE-_-NONE- ANGSTROM SCIENCE. INC'S DC LINEAR MAGNETRON ASSEMBLY | ANGSTROM SCIENCES INC Pennsylvania | National Aeronautics and Space Administration National Aeronautics and Space Administration | — | DUQUESNE, PA-12 | 2024 | $145,000 |
Top 50 awards shown, ranked by obligated amount. Dates reflect performance period; last-modified dates match USAspending.gov. Complete listings include all transaction history going back to FY2024.
Top Recipients
View All→Spending by State
| State | Funding | Awards |
|---|---|---|
| Minnesota | $33.8M | 4 |
| California | $15.0M | 22 |
| Maryland | $5.4M | 10 |
| New Jersey | $2.9M | 2 |
| Oregon | $2.7M | 1 |
| Arizona | $1.9M | 5 |
| District of Columbia | $1.9M | 8 |
| Florida | $1.8M | 3 |
| Pennsylvania | $1.6M | 11 |
| Colorado | $1.3M | 3 |
| Massachusetts | $1.2M | 2 |
| New York | $1.1M | 5 |
| Ohio | $387K | 3 |
| Georgia | $262K | 6 |
| Illinois | $247K | 1 |
| Connecticut | $109K | 1 |
| Michigan | $43K | 1 |
| New Hampshire | $32K | 2 |
| Virginia | $15K | 1 |
| Texas | $13K | 1 |
| Tennessee | $0 | 2 |
Source: USAspending.gov · All Industries